Key Features Low Breakage rate High Throughput Flex picker robot transfer Surface Inspection：Option Loader: Quartz Boat Unload：Manz Box / Cassette(option)

Furnace tube process is commonly used for wafer phosphorous diffusion . Chroma is not only providing short boat but also long boat for diffusion process loader/Unloder system to our customers. High speed flex picker robots are used on wafer transfer . Chroma provide the lower breakage, high throughout and low cost loader and unloader system in diffusion process and met our customer all of diffusion process function requirement.